Effect of Ba substitution on the microstructure and electrical conductivity of Ba_xSr_<1-x>RuO_3 thin films prepared by laser ablation(<Feature>Global Innovation in Advanced Ceramics)

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Ba_xSr_<1-x>RuO_3 (BSRO) thin films were prepared by laser ablation on quartz substrates at a substrate temperature (T_<sub>) of 973 K and an oxygen pressure (Po_2) of 13 Pa. The effect of Ba substitution for Sr on the microstructure and electrical conductivity (σ) was investigated. (110)-oriented pseudo-cubic BSRO thin films were obtained at a Ba substitution ratio (x) below 0.5. The thin films prepared at x = 0.6 to 0.8 had the 4H-type BaRuO_3 (BRO) structure, whereas 9R BRO thin films were obtained at x = 1.0. The BSRO thin films consisted of well-crystallized fine grains. The pseudo-cubic lattice parameter of the BSRO thin films increased linearly from 0.393 to 0.407 with increasing x. The BSRO thin films showed metallic conduction, and the σ decreased due to lattice expansion with increasing x.
社団法人日本セラミックス協会の論文
2008-03-01