Microstructure and Preferred Orientation of Titanium Nitride Films Prepared by Laser CVD
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2009-08-01
著者
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TU Rong
Institute for Materials Research, Tohoku University
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GOTO Takashi
Institute for Materials Research, Tohoku University
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Tu Rong
Institute For Materials Research Tohoku University
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Goto Takashi
Institute For Material Research Tohoku University
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GONG Yansheng
Institute for Materials Research, Tohoku University
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Gong Yansheng
Institute For Materials Research Tohoku University
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