Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2007-01-01
著者
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Kimura Teiichi
Institute For Materials Research Tohoku University
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Sakata Masato
Institute For Materials Research Tohoku University
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Goto Takashi
Institute For Material Research Tohoku University
関連論文
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- Preparation of ZrB_2-SiC composites by arc melting and their properties(Global Innovation in Advanced Ceramics)
- Apatite formation behavior on bio-ceramic films prepared by MOCVD
- Precipitation Behavior in a Hanks' Solution on Ca-P-O Films Prepared by Laser CVD
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- Hydroxyapatite Formation on Ca-P-O Coating Prepared by MOCVD
- Preparation of Hydroxyapatite and Calcium Phosphate Films by MOCVD
- Hydroxyapatite Formation on CaTiO_3 Film Prepared by Metal-Organic Chemical Vapor Deposition
- Evaluation of Calcium Phosphate Coating Films on Titanium Fabricated Using RF Magnetron Sputtering
- Preparation of Pyrochlore Ca_2Ti_2O_6 by Metal-Organic Chemical Vapor Deposition
- Phase Formation and Solidification Routes Near Mo-Mo_5SiB_2 Eutectic Point in Mo-Si-B System
- Orientation control of α-Al2O3 films prepared by laser chemical vapor deposition using a diode laser
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