Effect of Oxygen Gas Addition on Preparation of Iridium and Platinum Films by Metal-Organic Chemical Vapor Deposition
スポンサーリンク
概要
著者
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Hirai Toshio
Institute For Materals Research Tohoku University
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Goto Takashi
Institute For Material Research Tohoku University
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Vargas J.
Institute For Materials Research Tohoku University
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Vargas J.Roberto
Institute for Materials Research, Tohoku University
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