Experimental Surface Acoustic Wave Properties of AIN Thin Films on Sapphire Substrates
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-01-01
著者
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HIRAI Toshio
Institute for Materials Research, Tohoku University
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Hirai Toshio
Institute For Materals Research Tohoku University
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KANNO Yasuhito
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Ltd.
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KAYA Kiyoshi
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Ltd.
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Kaya Kiyoshi
Electronics Materials And Devices Laboratory Asahi Chemical Industry Cooperation Ltd.
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菅野 康人
Central Research Laboratories Asahi Chemical Industry Co. Ltd.
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TAKAHASHI Hiroshi
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Ltd.
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SHIBATA Yoshihiko
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Ltd.
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Shibata Y
Electronics Materials And Devices Laboratory Asahi Chemical Industry Cooperation Ltd.
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Takahashi Hiroshi
Electronics And Information Technology Research Laboratory Nissan Research Center Nissan Motor Co. Ltd.
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