Synthesis of AIN Thin Films on Sapphire Substrates by Chermical Vapor Deposition of AlCl_3 -NH_3 System and Surface Acoustic Wave Properties
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-05-15
著者
-
HIRAI Toshio
Institute for Materials Research, Tohoku University
-
Hirai Toshio
Institute For Materals Research Tohoku University
-
KANNO Yasuhito
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Ltd.
-
KAYA Kiyoshi
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Ltd.
-
Kaya Kiyoshi
Electronics Materials And Devices Laboratory Asahi Chemical Industry Cooperation Ltd.
-
菅野 康人
Central Research Laboratories Asahi Chemical Industry Co. Ltd.
-
TAKAHASHI Hiroshi
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Ltd.
-
SHIBATA Yoshihiko
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Ltd.
-
KIYA Kiyoshi
Electronics Materials and Devices Laboratory, Asahi Chemical Industry Cooperation, Lid.
-
Shibata Y
Electronics Materials And Devices Laboratory Asahi Chemical Industry Cooperation Ltd.
-
Takahashi Hiroshi
Electronics And Information Technology Research Laboratory Nissan Research Center Nissan Motor Co. Ltd.
関連論文
- Spark Plasma Sintering of BCN Ceramics Derived from Pyridine-Borane Complex (特集 放電焼結の基礎と応用)
- Synthesis of BaTiO_3 Thin Films Substituted with Hafnium and Zirconium by a Laser Ablation Method Using the Fourth-harmonic Wave of a YAG Laser
- Optical Properties of Ba_2NaNb_5O_ Film Fabricated by RF Magnetron Sputtering Method
- Preparation of Ba_2NaNb_5O_ Film by RF Magnetron Sputtering Method
- Preparation and Dielectric and Electrooptic Properties of Bi_4Ti_3O_ Films by Electron Cyclotron Resonance plasma Sputtering Deposition : Thin Films
- Preparation of Superconducting YBa_2Cu_3O_ Films by ECR Plasma Sputtering
- PC-7 GaSb/InSb/AlGaAsSb/LiNbO_3構造高効率Strip-coupled型SAWコンボルバの開発
- 半導体膜/圧電体基板構造を用いたSAWデバイスの開発
- A-5-7 高効率Strip-coupled型SAWコンボルバの開発
- Corrosion Behavior of Glass Coated Hastelloy-XR in Boiling Sulfuric Acid
- Thermoelectric Properties of B_4C-SiB_n(n=4, 6, 14)In-situ Composites
- Synthesis and Thermoelectric Properties of Boron-rich Silicon Borides
- Carrier Concentration Dependence of Thermal Conductivity of Iodine-Doped n-Type PbTe
- Effect of Sn Content on the Electrical Properties and Thermal Conductivity of Pb_ Sn_x Te
- K添加p型PbTeの作製と熱電特性
- Low-Temperature Synthesis of C-Axis-Oriented Polycrystalline Aluminum Nitride Films by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Using AlBr_3-N_2-H_2-Ar Gas System
- Preparation of AlN-Al_2O_3 Composite Films by Microwave Plasma Chemical Vapor Deposition
- Effect of Ar Gas Addition on AlN Film Formation by Microwave Plasma Chemical Vapor Deposition
- Low-Temperature Growth of Polycrystalline AlN Films by Microwave Plasma CVD
- Dimensional Crossover Effect of Pinning in YBa_2Cu_3O_7 Films
- Dimensional Crossover Effect in J_c Characteristics of Chemical Vapor Deposition Processed YBa_2Cu_3O_ Films
- Study of Resistive Superconducting Transition in YBa_2Cu_3O_7 Films(High-T_c Superconducting Materials Research)
- Critical Current Properties and Microstructures in CVD-Y_1Ba_2Cu_3O_ Films(High-T_c Superconducting Materials Research)
- Anisotropic Behavior Critical Current Density and Magnetic Relaxation in High-J_c YBa_2Cu_3O_7 Films : III-B Flux-Line Dynamics : III Oxide Superconductors, Experiments III : Superconducting State
- Low-Temperature Deposition of Y-Ba-Cu-O Superconducting Films by Thermal Chemical Vapor Deposition
- Submillimeter-Wave Response of Nb-YBaCuO Point-Contact Josephson Junctions Using YBaCuO Thin Films Prepared by CVD
- Thin Film Structure of YBa_2Cu_3O_ on (001) MgO Substrate Studied by TEM
- Josephson Current in Microbridges of YBa_2Cu_3O_ Thin Films Prepared by CVD
- YBCO DC SQUID of MOCVD Thin Film Bridge
- Bridge Type Josephson Junctions in MO-CVD Thin Films
- Critical Current Criterion in High-T_c Superconducting Films
- Preparation of Bi-Sr-Ca-Cu-O Superconducting Films by CVD
- T_c of c-Axis-Oriented Y-Ba-Cu-O Films Prepared by CVD : Electrical Properties of Condensed Matter
- Formation and Surface Acoustic Wave Properties of LiNbO_3/AlN/Sapphire
- Strain Mechanism of LiNbO_3/Sapphire Heterostructures Grown by Pulsed Laser Deposition
- Surface Acoustic Wave Properties of Lithium Tantalate Films Grown by Pulsed Laser Deposition
- Preparation of Superconducting Sr_2CuO_2(CO_3)_(BO_3)_x Films by Metalorganic Chemical Vapor Deposition
- Effect of Heat Treatment on the Microstructure of Amorphous Si-N-C Fine Powders
- BaFe_Co_xTi_xO_(x=0, 0.6, 0.9)Films Synthesized by the Spray-ICP Technique
- Development of High-Efficiency Strip-Coupled Surface Acoustic Wave Convolver Using GaSb/InSb/AlGaAsSb/LiNbO_3 Structures
- Formation of Refractory WC Compound by Mechanical Solid State Reduction
- Fabrication and Thermal Properties of Polyimide/Cu Functionally Graded Material (特集 傾斜機能材料)
- Consolidation of Ball-milled(Al-TM)-SiC(TM;Ti,Mo and Cu)Composite Powders by Plasma Activated (特集 多元系混合粉の焼結過程および焼結機構)
- Plasma Activated Sintering for Consolidation of Mechanically Reacted TiN Powder (特集 金属間化合物の粉体冶金と諸物性)
- Correlation Between Hardness and Residual Stress in ZrO2(3Y)/metal Functionally Graded Materials (傾斜機能材料)
- Synthesis and Surface Acoustic Wave Properties of AlN Thin Films Fabricated on (001) and (110) Sapphire Substrates Using Chemical Vapor Deposition of AlCl_3-NH_3 System
- Experimental Surface Acoustic Wave Properties of AIN Thin Films on Sapphire Substrates
- Synthesis of AIN Thin Films on Sapphire Substrates by Chermical Vapor Deposition of AlCl_3 -NH_3 System and Surface Acoustic Wave Properties
- Microstructure of Al2O3-Y3Al5O12(YAG) Eutectic Composite Prepared by Melting and SPS (特集 放電焼結の基礎と応用)
- Metalorganic Chemical Vapor Deposition of BaTiO_3 Films on MgO(100) : Thin Films
- Phase Relationship in a BaO-Bi_2O_3-TiO_2 System and Electrical Properties of BaTiO_3 with Addition of Bi_4Ti_3O_
- Epitaxial Growth of LiNbO_3 Films on Sapphire Substrates by Excimer Laser Ablation Method and Their Surface Acoustic Wave Properties
- Vapor - Deposited Functionally Gradient Materials
- Preparation of Barium Titanate Film by Metal-Organic Chemical Vapor Deposition and its Thermodynamic Analysis
- Preparation of Al-O-N Films by Electron Cyclotron Resonance Plasma-Assisted Chemical Vapor Deposition
- Effect of Oxygen Gas Addition on Preparation of Iridium and Platinum Films by Metal-Organic Chemical Vapor Deposition
- IMK IMAGE SENSORS FOR INTELLIGENT AUTOMOTIVE APPLICATIONS
- Preparation of Al–O–N Films by Electron Cyclotron Resonance Plasma-Assisted Chemical Vapor Deposition