Structural Study of Cu/Co Multilayer by Anomalous Small-Angle X-ray Scattering

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概要

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• The diffraction peaks in the small-angle region due to a long period of a Cu/Co multilayer were observed with the anomalous small-angle x-ray scattering in reflection geometry. These peaks appear to be enhanced because of a large negative value of the real part of the anomalous. dispersion term of Co just below the Co K-absorption edge. By comparing the relative integrated intensities of these peaks with the theoretical values calculated from a trapezoidal concentration model, the concentration profile along the surface normal in this multilayer has been determined.

• 東北大学の論文
• 1993-03-29

著者

• Matsubara Eiichiro

  Institute For Advanced Materials Processing

• Waseda Yoshio

  Institute For Advanced Materials Processing

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