Effects of Ion Beam Energy on the Formation of Cubic Boron Nitride Thin Films by Pulsed Nd:YAG Laser Deposition
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概要
- 論文の詳細を見る
Cubic boron nitride (cBN) thin films are synthesized on Si(100) substrates by a pulsed neodymium:yttrium-aluminumgarnet (Nd:YAG) laser deposition method using an ion beam in order to enhance the synthesis of the cBN phase. The deposited films were characterized by a Fourier transform infrared (FT-IR) measurement method. When a pure N_2 ion beam is used, some absorption peaks for hexagonal boron nitride (hBN) are visible, but the peak for cBN cannot be observed. When argon(Ar) gas is mixed with the reactant nitrogen(N_2) gas, the peak at 1050 cm^<-1> for cBN appears, in addition to those of hBN. When the ion-beam current and voltage is increased to 20 mA and 400 V, the absorption peak intensity for cBN increases, and that of hBN disappears. These results suggest that nitrogen and argon ion bombardment plays an important role in the formation of cBN films.
- 社団法人応用物理学会の論文
- 2000-07-30
著者
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川崎 仁晴
佐世保工業高等専門学校電気電子工学科
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HIRAISHI SATOSHI
Department of Pediatrics, Kitasato University School of Medicine
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DOI Kazuya
Department of Advanced Prosthodontics, Division of Cervico-Gnathostomatology, Programs for Applied B
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Doi Kazuya
Department Of Electrical Engineering Sasebo National College Of Technology
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KAWASAKI Hiroharu
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical E
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Suda Yoshiaki
Department of Electrical Engineering, Sasebo National College of Technology, 1-1 Okishin, Sasebo, Na
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Kawasaki Hiroharu
Department Of Electrical Engineering Sasebo National College Of Technology
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Hiraishi Satoshi
Department Of Electrical Engineering Sasebo National College Of Technology
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Suda Yoshiaki
Department Of Electrical Engineering Sasebo National College Of Technology
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Suda Yoshiaki
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
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Kawasaki Hiroharu
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
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