Characterization of Crystalline TiC Films Grown by Pulsed Nd:YAG Laser Deposition
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概要
- 論文の詳細を見る
Titanium carbide(TiC)thin films have been grown on Si(100)substrates using a pulsed neodymium:yttrium-aluminume-garnet(Nd:YAG)laser deposition method. X-ray diffraction(XRD)pattern of the TiC films shows that substrate temperature is one of the most important parameters in the fabrication of crystalline TiC film. Crystalline TiC films can be prepared at substrate temperatures above 500℃. Field emission scanning electron microscope(FE-SEM)indicates that the surface of the films is very smooth and pinhole-free.
- 社団法人応用物理学会の論文
- 2000-07-30
著者
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Rao K.v.
Department Of Chemistry University Of Delhi
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Rao K.v.
Department Of Condensed Matter Physics Royal Institute Of Technology
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Grishin A
Royal Inst. Technol. Kista Swe
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Kawasaki Hiroharu
Department Of Electrical Engineering Sasebo National College Of Technology
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Suda Yoshiaki
Department Of Electrical Engineering Sasebo National College Of Technology
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CHO Choong-Rae
Department of Condensed Matter Physics, Royal Institute of Technology
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GRISHIN Alex
Department of Condensed Matter Physics, Royal Institute of Technology
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Cho Choong-rae
Department Of Condensed Matter Physics Royal Institute Of Technology
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Suda Yoshiaki
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
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Kawasaki Hiroharu
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
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