Formation and Properties of Carbon Nitride Thin Films by Pulsed Nd:YAG Laser Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Carbon nitride thin films were synthesized on Si(100) substrates by pulsed Nd:YAG laser deposition. Several spectral lines originating from the neutral and ionic species, such as carbon atoms, carbon ions, carbon molecules and carbon nitride molecules were identified in the plasma plume. The surface morphology of the carbon nitride thin films reveals numerous droplets on the films out of which several are spiral shaped. The N/C composition ratio is increased from 0.18 to 0.25 with increasing substrate bias voltage. Fourier transform infrared spectroscope absorption spectra show two characteristic bands: a broad band composed of the graphite G-band and disordered D-band of carbon, and another associated with the CN triple bond. Raman spectra have also been used to characterize the films.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-02-28
著者
-
DOI Kazuya
Department of Advanced Prosthodontics, Division of Cervico-Gnathostomatology, Programs for Applied B
-
Doi Kazuya
Department Of Electrical Engineering Sasebo National College Of Technology
-
KAWASAKI Hiroharu
Department of Electronic Device Engineering, Graduate School of Information Science and Electrical E
-
Suda Yoshiaki
Department of Electrical Engineering, Sasebo National College of Technology, 1-1 Okishin, Sasebo, Na
-
Namba Jun
Department of Electrical Engineering, Sasebo National College of Technology, 1-1 Okishin, Sasebo, Na
-
Imura Fumiaki
Department of Electrical Engineering, Sasebo National College of Technology, 1-1 Okishin, Sasebo, Na
-
Kawasaki Hiroharu
Department Of Electrical Engineering Sasebo National College Of Technology
-
Imura Fumiaki
Department Of Electrical Engineering Sasebo National College Of Technology
-
Suda Yoshiaki
Department Of Electrical Engineering Sasebo National College Of Technology
-
Namba Jun
Department Of Electrical Engineering Sasebo National College Of Technology
-
Suda Yoshiaki
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
-
Kawasaki Hiroharu
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
関連論文
- Development of New Drug Delivery System for Implant Bone Augmentation Using a basic Fibroblast Growth Factor-gelatin Hydrogel Complex
- Development of Cell-hybrid Artificial Bone : Effect of Osteogenic Differentiation of Bone Marrow Stromal Stem Cells on Bone Formation with Newly Developed Interconnected Porous Calcium Hydroxyapatite
- NOx Gas Sensor Using Tungsten Oxide(WO3) Thin Film Prepared by Pulsed Laser Deposition (Proceedings of The 5Th East Asian Conference on Chemical Sensors: The 33RD Chemical Sensor Symposium)
- Roles of SiH_3 and SiH_2 Radicals in Particle Growth in rf Silane Plasmas
- Formation and Properties of Carbon Nitride Thin Films by Pulsed Nd:YAG Laser Deposition
- Effects of Ion Beam Energy on the Formation of Cubic Boron Nitride Thin Films by Pulsed Nd:YAG Laser Deposition
- Effect of Exercise Using a Horse-Riding Simulator on Physical Ability of Frail Seniors
- Dynamics of Silicon Particles in DC Silane Plasmas Transported by a Modulated Magnetic Field ( Plasma Processing)
- Investigation of Particulate Growth Processes in RF Silane Plasmas Using Light Absorption and Scanning Electron Microscopic Methods ( Plasma Processing)
- Effect of Oxygen Gas Pressure on Electrical, Optical, and Structural Properties of Al-Doped ZnO Thin Films Fabricated by Pulsed Laser Deposition for Use as Transparent Electrodes in All-Solid-State Electrochromic Devices
- Influence of Heavy Particle Collision on Optical Emission in Cathode Fall of DC Argon/Silane Glow Discharge ( Plasma Processing)
- Initial bone regeneration around fenestrated implants in Beagle dogs using basic fibroblast growth factor-gelatin hydrogel complex with varying biodegradation rates
- Characterization of Crystalline TiC Films Grown by Pulsed Nd:YAG Laser Deposition
- Study on Initial Growth of Particles in Low-Pressure and Low-Power GeH_4 RF Discharges Using the High-Sensitivity Photon-Counting Laser-Light-Scattering Method
- Transition of Particle Growth Region in SiH_4 RF Discharges
- Similarities in Spatial Distributions of Absolute GeH_2 Density, Radical Production Rate and Particle Amount in GeH_4 RF Discharges
- Study on Growth Processes of Subnanometer Particles in Early Phase of Silane RF Discharge ( Plasma Processing)
- Development of New Preparation System for Highly Sensitive Flammable Gas Sensor
- Characteristics of Tin Oxide Thin Films Prepared by Pulsed Laser Deposition Using SnO2 Targets (Proceedings of The 5Th East Asian Conference on Chemical Sensors: The 33RD Chemical Sensor Symposium)
- Chromium Carbide Thin Films Synthesized by Pulsed Nd:YAG Laser Deposition
- Characterization of Tantalum Nitride Thin Films Fabricated by Pulsed Nd:YAG Laser Deposition Method
- Roles of SiH3 and SiH2 Radicals in Particle Growth in rf Silane Plasmas
- A Preliminary Study on a Newly Developed Cell-hybridized Artificial Bone in a Beagle Dog: Bone Marrow Stromal Cells with an Interconnected Porous Hydroxyapatite Scaffold
- Comparative evaluation of bone regeneration using spherical and irregularly shaped granules of interconnected porous hydroxylapatite. A beagle dog study