Chromium Carbide Thin Films Synthesized by Pulsed Nd:YAG Laser Deposition
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概要
- 論文の詳細を見る
Chromium carbide thin films are synthesized on Si(100) substrates by a pulsed Nd:YAG laser deposition method at different substrate temperatures. Glancing-angle X-ray diffraction shows that a crystalline chromium carbide film can be prepared at the substrate temperature of 700℃. Grain size of the films, examined with a field-emission secondary electron microscope, increases with increasing substrate temperature.
- 社団法人応用物理学会の論文
- 1999-06-15
著者
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Kawasaki Hiroharu
Department Of Electrical Engineering Sasebo National College Of Technology
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Suda Yoshiaki
Department Of Electrical Engineering Sasebo National College Of Technology
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Emura Masanari
Department Of Electrical Engineering Sasebo National College Of Technology
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TERAJIMA Ryou
Department of Electrical Engineering, Sasebo National College of Technology
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Terajima Ryou
Department Of Electrical Engineering Sasebo National College Of Technology
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Suda Yoshiaki
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
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Kawasaki Hiroharu
Department of Electrical and Electronic Engineering, Sasebo National College of Technology, Sasebo, Nagasaki 857-1193, Japan
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