Characterization of Residual Impurities in Highly Pure Si Crystals by Photoluminescence Technique : C-3: CRYSTAL TECHNOLOGY
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1980-04-30
著者
-
Tajima Michio
Electrotechnical Laboratory
-
Abe Takao
Shin-etsu Handotai
-
Yusa Atsushi
Komatsu Electronic Metals Co.
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