Mechanical Strength of Oxygen-doped Float-Zone Silicon Crystals
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概要
- 論文の詳細を見る
The characteristics of the mechanical properties of float-zone silicon crystals doped with oxygen at concentrations of 1.0〜1.5×10^<17> cm^<-3> are investigated. The strength of the doped crystals is measured to be considerably higher than that of ordinary float-zone crystals. The high strength of such doped crystals is found to be retained even after heat-treatment at 1050℃, which softens Czochralski silicon crystals drastically.
- 社団法人応用物理学会の論文
- 1980-12-05
著者
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Sumino Koji
The Research Institute For Iron Steel And Other Metals
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Yonenaga Ichiro
The Research Institute For Iron Steel And Other Metals Tohoku University
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YUSA Atsushi
Komatsu Electronic Metals Co. Ltd.
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Yusa Atsushi
Komatsu Electronic Metals Co.
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