The Effects of Polishing Damage and Oxygen Concentration on Gate Oxide Integrity in Silicon Crystals
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-05-15
著者
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ABE Takao
Shin-Etsu Handotai Company, Limited
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Abe Takao
Shin-etsu Handotai
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Kato Y
Sony Corp. Tokyo Jpn
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KATO Yuichi
SEIKO Instruments, Takatsuka Units
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Kato Yuichi
Seiko Instruments Takatsuka Units
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