Damage to Nb_3Ge Films during CF_4 Cleaning

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1984-11-20

著者

• Rogalla Horst

  Institut Fir Angewandte Physik Der Justus-liebig-universitat

• Kato Y

  Nec Corp. Kanagawa Jpn

• Kato Yoshiaki

  Advanced Photon Research Center Kansai Research Establishment Japan Atomic Energy Research Institute

• Kato Y

  Sony Corp. Tokyo Jpn

• KATO Yujiro

  Institut fir Angewandte Physik der Justus-Liebig-Universitat

• DAVID Bernd

  Institut fir Angewandte Physik der Justus-Liebig-Universitat

• Kato Y

  Process Research Process R&d Laboratories For Technology Development Banyu Pharmaceutical Co. Lt

関連論文

• Optimum Design of Exploding Pusher Target to Produce Maximum Neutrons
• Efficient Spherical Compression of Cannonball Targets with 1.052-μm Laser Beams
• Double-Pass Amplification in Ge Soft X-Ray Laser with a Polarizing Half-Cavity
• Generation of Super-Fast Ions due to Nonlinear Processes near the Quarter Critical Density in Laser-Produced Plasmas
• Subpicosecond Nd : glass Laser System for Kilovolt X-ray Generation
• Analysis of Pulse Compression with Perturbation Method
• Subpulse Suppression of Chirped-Pulse Amplification Nd:Glass Laser Pulse with Time-Predelay Second-Harmonic Generation
• Peak Intensity Enhancement and Pulse Compression of a Picosecond Laser Pulse by Frequency Doubling with a Predelay
• Second-Harmonic Generation of a Picosecond Laser Pulse at High Intensities with Time Predelay
• Pedestal Reduction by Temporal and Spectral Filterings in Chirped Pulse Amplification
• Quasi-CW 110kW AlGaAs Laser Diode Array Module for Inertial Fusion Energy Laser Driver : Optics and Quantum Electronics
• Design and Performance of a Diode-Pumped Nd:Silica-Phosphate Glass Zig-Zag Slab Laser Amplffier for Inertial Fusion Energy : Optics and Quantum Electronics
• Direct Interferometric Measurement of Static and Nonlinear Wavefront Distortions of a High Power Glass Laser Beam
• Influence of Laser Pulse Duration on N_2^+, N^+, and N^ Formation Processes in the Nitrogen Molecule
• Asymmetric Synthesis of a Selective Endothelin A Receptor Antagonist
• Prebake Effects in Chemical Amplification Electron-Beam Resist : Resist and Processes
• Prebake Effects in Chemical Amplification Electron-Beam Resist
• Three Dimensional Laser Simulation Code on a Desktop Personal Computer
• Fast Three-Dimensional Computation of the Optical Propagation Equation Using a Desktop Personal Computer
• The Effects of Polishing Damage and Oxygen Concentration on Gate Oxide Integrity in Silicon Crystals
• A Novel Method of Beryllium Window Protection in a Plasma Focus Soft X-Ray Source
• Vibration of Beryllium Foil Window Caused by Plasma Particle Bombardment in Plasma Focus X-Ray Source
• Influence of rf Plasma in Plasma Cleaning Process on Properties of Thin Superconducting Nb_3Ge Films
• Damage to Nb_3Ge Films during CF_4 Cleaning
• High-Precision Measurement of the Wavelength of a Nickel-like Silver X-ray Laser
• Demonstration of a Transient High Gain Soft X-Ray Laser for Neon-Like Argon : Optics and Quantum Electronics
• Spatial Coherence Measurement of 13.9nm Ni-like Ag Soft X-Ray Laser Pumped by a 1.5ps, 20J Laser
• Asymmetric Synthesis of an Endothelin Receptor Antagonist
• Soft-X-Ray Lasers with Charge Transfer Pumping in a Mixture of Clusters and Atomic Gases

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