Influence of rf Plasma in Plasma Cleaning Process on Properties of Thin Superconducting Nb_3Ge Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-01-20
著者
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Rogalla Horst
Institut Fir Angewandte Physik Der Justus-liebig-universitat
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Kato Y
Nec Corp. Kanagawa Jpn
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Kato Yoshiaki
Advanced Photon Research Center Kansai Research Establishment Japan Atomic Energy Research Institute
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Kato Y
Sony Corp. Tokyo Jpn
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KATO Yujiro
Institut fir Angewandte Physik der Justus-Liebig-Universitat
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DAVID Bernd
Institut fir Angewandte Physik der Justus-Liebig-Universitat
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Kato Y
Process Research Process R&d Laboratories For Technology Development Banyu Pharmaceutical Co. Lt
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