Soft X-Ray Image Sensor Using Hydrogenated Amorphous Silicon
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概要
- 論文の詳細を見る
The effective absorption coefficient of a-Si:H was measured as 100 to 300 cm^<-1> for an X-ray tube voltage of 50 kV to 10 kV. For soft X-ray image sensor, a-Si:H target vidicons with a Be face plate were demonstrated. Resolution of a 1 inch tube was greater than 800 TV lines and sensitivity was 1.13 nA/cm^2/mR for an a-Si:H film about 7 μm thick.
- 社団法人応用物理学会の論文
- 1985-02-20
著者
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Hatanaka Yoshinori
Research Institute Of Electronics Graduate School Of Electronic Science And Technology Shizuoka Univ
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Mimura Hidenori
Graduate School Of Electronic Science And Technology Shizuoka University
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Hatanaka Yoshinori
Research Institute Of Electronics Shizuoka University:graduate School Of Electronic Science And Tech
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Mimura Hidenori
Graduate School Electronic Science And Technology
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Chuang ZENG
Chan-Chun Opt. Fine Mecha. Res. Inst.
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