Spot Size Converter with Vertically Tapered Waveguide Core Fabricated by Sputter Etching

概要

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Superhigh $\Delta$ (${>}1.5$%) waveguides are receiving more attention to realize integrated functional circuits. However, one of the problems in the adoption of superhigh $\Delta$ waveguides is an increase in coupling loss between a waveguide and a conventional single mode fiber. To overcome this problem we have proposed the use of a spot size converter (SSC) that has a well-designed vertical taper fabricated by sputter etching. In this paper, we describe the fabrication process of this SSC, and particularly discuss the adjustment of an incline angle in sputter etching.
2008-06-25