Desorption of the Excess Gallium Atoms at the Surface of Gallium Arsenide and Application to Atomic Layer Epitaxy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1989-02-20
著者
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Isu T
Mitsubishi Electric Corp. Amagasaki‐shi Jpn
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Isu T
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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Isu Toshiro
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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Isu Toshiro
Optoelectronics Technology Research Laboratory
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KATAYAMA Yoshifumi
Optoelectronics Technology Research Laboratory
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Katayama Y
Murata Manufacturing Co. Ltd.
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SUGIYAMA Nao-haru
Optoelectronics Technology Research Laboratory
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