Properties of Superconducting ZrN Thin Films Deposited by dc Reactive Magnetron Sputtering
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概要
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The structural, superconducting and optical properties of ZrN thin fims deposited on single-crystal sapphire substrates by dc reactive magnetron sputtering are investigated. Their properties, in particular superconducting T_cs, strongly depend on substrate temperatures. Films with a highly (100) textured B1 structure, which are deposited at substrate temperatures above 700℃, exhibit T_cs and residual resistivity ratios as high as 10.0 K and 15. Systematic changes in the wavelength of the optical reflectivity edge suggests that Zr vacancies suppress T_c for films deposited at lower substrate temperatures.
- 社団法人応用物理学会の論文
- 1987-05-20
著者
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Tanabe K
Superconductivity Research Laboratory Istec
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Tanabe K
Ntt Interdisciplinary Res. Lab. Ibaraki Jpn
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Tanabe Keiichi
Ntt Electrical Communications Laboratories
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ASANO Hidefumi
NTT Electrical Communications Laboratories
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KATOH Yujiro
NTT Electrical Communications Laboratories
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MICHIKAMI Osamu
NTT Electrical Communications Laboratories
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Katoh Y
Ntt Opto-electronics Laboratories
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Michikami O
Iwate Univ. Morioka‐shi Jpn
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