Ridge Structures Formed on Nd_3Ga_5O_<12> and Sm_3Ga_5O_<12> Single Crystal Substrates
スポンサーリンク
概要
- 論文の詳細を見る
Straight ridge patterns are formed in the [112] and [110] directions on (111) Nd_3Ga_5O_<12> (NGG) and Sm_3Ga_5O_<12> (SGG) single crystal substrates, and in the [001] and [110] directions on a (110) NGG substrate by argon ion- beam etching and subsequent soaking in a hot phosphoric acid solution. The ridge shapes are observed with a scanning electron microscope (SEM). The crystal faces, which appear on the ridge side walls, are examined. The anisotropic etching in the phosphoric acid solution strongly depends on the ridge direction as well as on the substrate orientation. The indices are similar to those observed for Gd_3Ga_5O_<12> (GGG).
- 社団法人応用物理学会の論文
- 1994-05-15
著者
-
Tate A
Ntt Photonics Laboratories Ntt Corporation
-
KATOH Yujiro
NTT Opto-Electronics Laboratories
-
Sugimoto N
National Institute For Environment Studies
-
Katoh Y
Ntt Opto-electronics Laboratories
-
TATE Akiyuki
NTT Opto-electronics Laboratories
-
SUGIMOTO Naoto
NTT Opto-Electronics Laboratories
関連論文
- Lidar Network System for Monitoring the Atmospheric Environment in Jakarta City
- High-T_c Y-Ba-Cu-O Thin Films Prepared by Dual Magnetron Sputtering
- Synthesis of Y-Ba-Cu-O Thin Films on Sapphire Substrates by RF Magnetron Sputtering
- Low-Temperature Growth of High-T_c Bi-Sr-Ca-Cu-O Films by Magnetron Sputtering : Electrical Properties Condensed Matter
- Preparation of YBaCuO Thin Film dc SQUID : Electrical Properties of Condensed Matter
- An Improved Method for Wind Measurements with a Conical-Scanning Correlation Lidar
- Wide-Band Thermo-Optic Wavelength Tunable Filter Using Silicone Resin with a Fast Response for WDM Systems
- Completely Bi-Substituted Iron Garnet (BIG) Films Prepared by Electron Cyclotron Resonance (ECR) Sputtering
- Epitaxial Growth of Superconducting Nb_3Ge Films on YSZ Single-Crystal Substrates
- Tunneling Measurements of Thin Film Y-Ba-Cu-O/Nb Junctions
- Fabrication of High-T_c Oxide Superconductor Tunnel Junctions
- Nb-Oxide-Pb Tunnel Junctions Fabricated Using CF_4 Cleaning Process. (III) Preparation of Planar dc SQUID
- Low-Driving-Voltage Electro-Optic Modulator With Novel KTa_Nb_xO_3 Crystal Waveguides
- Crystallinity of Ce Substituted YIG Films Prepared by RF Sputtering
- Preparation of Magneto-Optic Single-Mode Buried Channel Waveguides of Lanthanum- and Gallium-Substituted Yttrium Iron Garnet
- Ridge Structures Formed on Nd_3Ga_5O_ and Sm_3Ga_5O_ Single Crystal Substrates
- Properties of Ce-Substituted Yttrium Iron Garnet Film Containing Indium Prepared by RF-Sputtering
- Structure and Lattice Deformation of Ce-Substituted Yttrium Iron Garnet Film Prepared by RF Sputtering
- Scanning Electron Microscope Observation of Ridge Structures Formed on (100) and (110) Gd_3Ga_5O_ Substrates
- Preparation of Substituted Y_3Fe_5O_ Single-Mode Buried Waveguides on a [1 0 0] Oriented Gd_3Ga_5O_ Substrate
- Preparation of Substituted Y_3Fe_5O_ Waveguide Directional Coupler Using Ion-Beam Etching
- [110]-Directed Ridge Formation of Epitaxial Y_3Fe_5O_ Film Grown on [111]-Oriented Gd_3Ga_5O_
- Influence of Growth Temperature on the Magnetic and Optical Properties of Liquid-Phase-Epitaxial(LPE)-Grown Lanthanum- and Gallium-Substituted Yttrium Iron Garnet((La, Ga):YIG) Films and Their Application to Waveguides
- Ion Incident Angle Dependence of Ridge Shapes Formed on [111] Oriented Gd_3Ga_5O_ by Ion Beam Etching
- Ar Ion-Beam Etching of Gadolinium-Gallium Garnet
- Wind Profiling by a Conical-Scanning Time-Correlation Lidar
- Formation of Ridges on Gd_3Ga_5O_ by Ion-Beam Etching and Subsequent Phosphoric Acid Treatment Utilizing Tri-Layered Etching Mask
- Properties of Superconducting ZrN Thin Films Deposited by dc Reactive Magnetron Sputtering
- Fabrication of All-Nb Josephson Junctions Using Oxidized Zr Overlayers
- Fabrication of A15 Nb_3Al Josephson Tunnel Junction using CF_4 Cleaning Process
- An Ellipsometric Study of Oxide Growth on Nb, Al and Nb_3Al Films by rf Plasma
- Stress-Induced Perpendicular Magnetic Anisotropy in PtMnSb Thin Films