Crystallinity of Ce Substituted YIG Films Prepared by RF Sputtering
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概要
- 論文の詳細を見る
The crystallinity of Ce-substituted yttrium iron garnet (Ce_1:YIG) film was studied by measuring X-ray diffraction (XRD) and deformation and by transmission electron microscope (TEM) observation. The Ce_1:YIG films were prepared on anisotropic etched or unetched GGG and cation doped GGG (GCGMZG) substrates by RF sputtering. They have a narrow crystallization region as regards substrate temperature and this region becomes narrower as the O_2 gas flow rate is increased. The XRD measurements and TEM observatiorn revealed that crystallized Ce_1:YIG films have a multilayered structure except for those on GCGMZG substrates. Their layered structure was dependent on their thickness, the substrate treatment, the lattice constant difference between the film and the substrate and the O_2 flow rate. They also exhibited compressive deformation which originated mainly from the lattice constant difference between the film and the substrate. The crystal growth mechanism of Ce_1:YIG films was considered on the basis of recent work on the growth mechanism of compressively deformed strained semicornductor film.
- 社団法人応用物理学会の論文
- 1996-06-15
著者
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Shibukawa A
Ntt Opto-electronics Laboratories
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MINO Shinji
NTT Optical Network Systems Laboratories
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UNO Takehiko
Department of Electrical Engineering, Nagoya University
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Tate A
Ntt Photonics Laboratories Ntt Corporation
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Mino Shinji
Ntt Opto-electronics Laboratories
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Uno Takehiko
Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology
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TATE Akiyuki
NTT Opto-electronics Laboratories
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SHIBUKAWA Atushi
NTT Opto-electronics Laboratories
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SHINTAKU Toshihiro
NTT Opto-electronics Laboratories
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Uno Takehiko
Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology
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