Energy Dependence of Angular Distributions of Sputtered Particles by Ion-Beam Bombardment at Normal Incidence
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概要
- 論文の詳細を見る
The angular distributions of sputtered Fe-atoms were measured using the Baser fluorescence technique during Ar-ion bombardment for energies of 0.6, 1, 2 and 3 keV at normal incidence. The measured cosine distribution at 0.6 keV progressively deviated to an over-cosine distribution at higher energies, and at 3 keV the angular distribution was an over-cosine distribution of about 20%. The experimental results agree qualitatively with calculations by a recent computer simulation code, ACAT. The results are explained by the competition between surface scattering and the effects of primary knock-on atoms, which tend to make the angular distributions over-cosine and under-cosine, respectively.
- 社団法人応用物理学会の論文
- 1986-01-20
著者
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Uchino Kiichiro
Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng
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Uchino Kiichiro
Department Of Energy Conversion Kyushu University
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Akazaki Masanori
Department Of Electrical Engineering And Computer Science Kumamoto University
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Akazaki Masanori
Department Of Energy Conversion Engineering Graduate School Of Engineering Science Kyushu University
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Maeda Mitsuo
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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Yamagata Y
Department Of Electrical And Computer Engineering Kumamoto University
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Manabe Yoshio
Matsushita Electric Industrial Co. Ltd.
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Ueda Yasutoshi
Department Of Applied Physics Okayama University Of Science
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真鍋 由雄
九大総理工
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Muraoka Katsunori
Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng
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MATSUDA Yoshinobu
Department of Electrical and Electronic Engineering, Nagasaki University
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YAMAGATA Yukihiko
Department of Electrical and Computer Engineering, Kumamoto University
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YAMAMURA Yasunori
Department of Applied Physics, Okayama University of Science
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YAMAMURA Yasunori
Okayama University of Science
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Yamamura Y
Okayama Univ. Sci. Okayama Jpn
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Matsuda Yoshinobu
Department Of Electrical And Electronic Engineering Nagasaki University
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Yamamura Yasunori
Department Of Applied Physics Faculty Of Science Okayama University Of Science
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