Diamond Nucleation Enhancement on Si by Controlling Ion-Bombardment Energy in Electron Cyclotron Resonance Plasma
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-09-15
著者
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内野 喜一郎
九州大学大学院総合理工学研究院
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MURAOKA Katsunori
Department of Energy Conversion, Graduate School of Engineering Sciences, Kyushu University
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UCHINO Kiichiro
Department of Energy Conversion,Kyushu University
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Uo Koji
Plasma Physics Laboratory Kyoto University
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内野 喜一郎
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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Uchino K
Kyushu Univ. Fukuoka
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Uchino Kiichiro
Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng
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Uchino Kiichiro
Department Of Energy Conversion Kyushu University
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Teii Kungen
Department of Quantum Engineering, Nagoya University
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Muraoka Katsunori
Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng
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KOUZUMA Yutaka
Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of En
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Uchino K
Kyushu Univ.
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TEII Kungen
Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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KOUZUMA Yutaka
Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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