In-Situ Measurement of Sputtering Yield of Graphite by VUV Laser Fluorescence Spectroscopy
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概要
- 論文の詳細を見る
The sputtering yield of graphite was measured for the first time by laser fluorescence spectroscopy using a tunable VUV source, where the optical system was absolutely calibrated by the Rayleigh scattering. It was shown that the technique was useful for quantitative studies of sputtering processes.
- 社団法人応用物理学会の論文
- 1988-06-20
著者
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MURAOKA Katsunori
Department of Energy Conversion, Graduate School of Engineering Sciences, Kyushu University
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AKAZAKI Masanori
Department of Energy Conversion,Graduate School of Engineering Sciences,Kyushu University
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MAEDA Mitsuo
Department of Electrical Engineering,Kyushu University
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KAJIWARA Toshinori
Department of Energy Conversion, Graduate School of Engineering Sciences, Kyushu Univetsily
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OKADA Tatsuo
Department of Electrical Engineering, Faculty of Engineering, Kyushu University
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Kawamoto Tohru
Nanotechnology Research Institute (nri) And Research Consortium For Synthetic Nano-function Material
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Akazaki Masanori
Department Of Electrical Engineering And Computer Science Kumamoto University
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Akazaki Masanori
Department Of Energy Conversion Engineering Graduate School Of Engineering Science Kyushu University
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Matsuda Yuko
Central R & D Laboratory Japan Energy Corporation
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Matsuda Y
Central R & D Laboratory Japan Energy Corporation
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Maeda Mitsuo
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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Manabe Yoshio
Matsushita Electric Industrial Co. Ltd.
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Muraoka Katsunori
Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng
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MATSUDA Yoshinobu
Department of Electrical and Electronic Engineering, Nagasaki University
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Okada Tatsuo
Department Of Electrical And Electronic Systems Engineering Graduate School Of Information Science A
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Kajiwara T
Mitsubishi Electric Corp. Kanagawa Jpn
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Kajiwara Toshinori
Department Of Electrical Engineering Faculty Of Engineering Fukuoka Institute Of Technology
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Kawamoto T
Department Of Organic And Polymeric Materials Graduate School Of Science And Engineering Tokyo Insti
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Matsuda Yoshinobu
Department Of Electrical And Electronic Engineering Nagasaki University
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