Electrical Circuit Design of Fast-Discharge System for High-Power Rare-Gas Halide Lasers
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概要
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The electrical characteristics of UV-preionized fast-discharge excimer lasers in which a flatplate pulse-forming line (PFL) insulated with pure water is charged by a high-voltage Marx-bank generator are investigated experimentally and analytically. Experimental results are reported on two types of laser system, single PFL and double PFL. An output energy of 1.3 J/pulse is obtained for XeCl excimers in the latter system with an active volume of 92 × 4 (gap length) × 1.5 cm^3. The electrical circuits of these systems are approximated by a simplified equivalent circuit, and the interdependence of the circuit parameters is discussed. In this case, the development of a transfer gap with a high switching voltage is important in order to improve the lasing efficiency. The circuit design of a large fast-discharge excimer laser whose output energy is of the order of 10 J/pulse is discussed briefly.
- 社団法人応用物理学会の論文
- 1981-01-05
著者
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MAEDA Mitsuo
Department of Electrical Engineering,Kyushu University
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MIYAZOE Yasushi
Department of Electrical Engineering, Faculty of Engineering, Kyushu University
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Maeda Mitsuo
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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NISHITARUMIZU Tsuyoshi
Department of Electrical Engineering, Faculty of Engineering, Kyushu University
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Miyazoe Yasushi
Department Of Electrical Engineering Faculty Of Engineering Fukuoka University
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Nishitarumizu Tsuyoshi
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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