Time-of-Flight Distributions of Si Atoms Ejected by KrF Laser Ablation of Si_3N_4
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-08-15
著者
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Nakata Y
Graduate School Of Information Science And Electrical Engineering Kyushu University
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MAEDA Mitsuo
Department of Electrical Engineering,Kyushu University
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OKADA Tatsuo
Department of Electrical Engineering, Faculty of Engineering, Kyushu University
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Nakata Yoshiki
Department Of Electrical And Electronic Systems Engineering Kyushu University
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Nakayama Yoshikazu
College Of Engineering University Of Osaka Prefecture
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Maeda Mitsuo
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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Nakayama Y
Univ. Tokyo Tokyo Jpn
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Okada Tatsuo
Department Of Electrical And Electronic Systems Engineering Graduate School Of Information Science A
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