Velocity-Distribution Functions of Sputtered Atoms Caused by Insufficiently Developed Collision-Cascades

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概要

• 論文の詳細を見る

• Velocity-distribution functions of sputtered iron atoms by argon-ton bombardment at oblique incidence, measured by laser fluorescence spectroscopy, were found to deviate from the Thompson formula at forward ejection angles relative to the incident tons. The effect was identified as being due to, and quantitatively evaluated by, contributions from in sufficiently developed collision-cascades.

• 社団法人応用物理学会の論文
• 1986-08-20

著者

• MURAOKA Katsunori

  Department of Energy Conversion, Graduate School of Engineering Sciences, Kyushu University

• AKAZAKI Masanori

  Department of Energy Conversion,Graduate School of Engineering Sciences,Kyushu University

• MAEDA Mitsuo

  Department of Electrical Engineering,Kyushu University

• HONDA Chikahisa

  Department of Electrical and Electronic Engineering, University of Miyazaki

• Akazaki Masanori

  Department Of Electrical Engineering And Computer Science Kumamoto University

• Akazaki Masanori

  Department Of Energy Conversion Engineering Graduate School Of Engineering Science Kyushu University

• Honda Chikahisa

  Department Of Electrical And Electronic Engineering University Of Miyazaki

• Honda Chikahisa

  Department Of Energy Conversion Graduate School Of Engineering Sciences Kyushu University

• Maeda Mitsuo

  Department Of Electrical Engineering Faculty Of Engineering Kyushu University

• Yamagata Y

  Department Of Electrical And Computer Engineering Kumamoto University

• Manabe Yoshio

  Matsushita Electric Industrial Co. Ltd.

• 真鍋 由雄

  九大総理工

• Muraoka Katsunori

  Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng

• MATSUDA Yoshinobu

  Department of Electrical and Electronic Engineering, Nagasaki University

• YAMAGATA Yukihiko

  Department of Electrical and Computer Engineering, Kumamoto University

• YAMAMURA Yasunori

  Department of Applied Physics, Okayama University of Science

• MATSUBAGUCHI Satoshi

  Department of Energy Conversion, Graduate School of Engineering Sciences, Kyushu University

• YAMAMURA Yasunori

  Okayama University of Science

• Yamamura Y

  Okayama Univ. Sci. Okayama Jpn

• Matsuda Yoshinobu

  Department Of Electrical And Electronic Engineering Nagasaki University

• Yamamura Yasunori

  Department Of Applied Physics Faculty Of Science Okayama University Of Science

• Matsubaguchi Satoshi

  Department Of Energy Conversion Graduate School Of Engineering Sciences Kyushu University

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