A Novel Sputter System with Dynamically Controlled Plasma
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概要
- 論文の詳細を見る
Abstract - A new type of plasma system based on the Magnetic Neutral Loop Discharge (NLD) concept has been developed for sputter application. This system is characterized by plasma production around the magnetic null field on the target surface, where an RF electric field is applied. From the experimental results and numerical analysis of electron behavior in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Varying the magnetic flux density of magnets and their arrangement can control effective electron heating around the null region.
- 社団法人 電気学会の論文
- 2004-07-01
著者
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成 烈
Dep. Of Electrical And Electronic Engineering Univ. Of Miyazaki Miyazaki 889-2192 Jpn
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成 烈〓
宮崎大学大学院工学研究科
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SUNG Youl-Moon
Department of Electrical Electronic Engineering, Kyungsung University
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OTSUBO Masahisa
Department of Electrical and Electronic Engineering, University of Miyazaki
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HONDA Chikahisa
Department of Electrical and Electronic Engineering, University of Miyazaki
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ATSUTA Satoru
Department of Electrical & Electronic Engineering, University of Miyazaki
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YANG Jong-Hwan
Department of Electrical & Electronic Engineering, University of Miyazaki
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Atsuta Satoru
Department Of Electrical & Electronic Engineering University Of Miyazaki
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Yang Jong-hwan
Department Of Electrical & Electronic Engineering University Of Miyazaki
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Sung Youl-moon
Department Of Electrical And Electronic Engineering Miyazaki University
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Otsubo Masahisa
Miyazaki University
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Otsubo Masahisa
Department Of Electrical Engineering Faculty Of Engineering Miyazaki University
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Honda Chikahisa
Department Of Electrical And Electronic Engineering University Of Miyazaki
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Honda Chikahisa
Department Of Energy Conversion Graduate School Of Engineering Sciences Kyushu University
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Otsubo M
Department Of Electrical And Electronic Engineering University Of Miyazaki
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Otsubo Masahisa
Department Of Electrical And Electronic Engineering Faculty Of Engineering University Of Miyazaki
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