Additional Plasma Surface Texturing for Single-Crystalline Silicon Solar Cells Using Dielectric Barrier Discharge
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概要
- 論文の詳細を見る
To reduce the light reflection from surfaces of single-crystalline solar cells, a new surface texturing technique using a dielectric barrier discharge was proposed and examined on wet-textured surfaces of single-crystalline Si substrates. Minute uneven structures were additionally formed on the entire area of a wet-textured surface of pyramid-like shape. When the discharge voltage was 3.5 kV, the reflectance was less than 8% at wavelengths from 400 to 1000 nm and showed a minimum of 5.3% at 520 nm.
- 2005-04-15
著者
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Sung Youl-moon
Department Of Electrical And Electronic Engineering Miyazaki University
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Tahara Minoru
Lsi And Fpd Equipment Cleaning Group Chinryo Corporation
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MATSUKUMA Kunihiro
Department of Electrical System and Computer Engineering, Sojo University
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Nakashima Yoshihiro
Lsi And Fpd Equipment Cleaning Group Chinryo Corporation
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Sakoda Tatsuya
Department Of Electrical And Electronic Engineering Faculty Of Engineering University Of Miyazaki
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Otsubo Kouji
Lsi And Fpd Equipment Cleaning Group Chinryo Corporation
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Tahara Minoru
LSI and FPD Equipment Cleaning Group, Chinryo Corporation, 1-92 Dohoku, Kitakyushu 807-0811, Japan
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Nakashima Yoshihiro
LSI and FPD Equipment Cleaning Group, Chinryo Corporation, 1-92 Dohoku, Kitakyushu 807-0811, Japan
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