Study on Behavior of Sputtered Particles during Surface Discharges
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概要
- 論文の詳細を見る
To investigate the behavior of Mg atoms sputtered from a MgO-coated electrode during plasma-display-panel (PDP)-like surface discharges formed on an electrode coated with dielectric materials, the relative density of sputtered Mg and dissociated Mg from MgO was measured by a laser induced fluorescence (LIF) technique. Additionally, optical emissions due to Mg and MgO were measured by optical emission spectroscopy (OES). The experimentally obtained results indicated that intermittently sputtered Mg atoms remained around the MgO-coated electrode for a long time and that Mg atoms also existed without recombining with O atoms. Additionally, numerical analyses were carried out using a two-dimensional plasma simulation code, and the results obtained were consistent with the experimental results.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-10-25
著者
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Sakoda Tatsuya
Department Of Electrical And Electronic Engineering Faculty Of Engineering University Of Miyazaki
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Sakoda Tatsuya
Department of Electrical and Electronic Engineering, University of Miyazaki, 1-1 Gakuenkibanadai-Nishi, Miyazaki 889-2192, Japan
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