Wave Aberration Testing System for Micro-Lenses by Shearing Interference Method
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概要
- 論文の詳細を見る
An automatic shearing interference system has been set up incorporating an ITV and a micro-computer in order to reduce measurement errors and shorten job time. The measuring principle and data collection process for the automatic measuring system are described here. The wave aberration of a planar microlens (0.91 mmφ, f=2.06 mm) was measured, and the accuracy of the present system was found to be 8.8% of λ, with the possibility of improvement.
- 社団法人応用物理学会の論文
- 1984-01-20
著者
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OIKAWA Masahiro
Research Laboratory of Precision Machinery and Electronics, Tokyo Institute of Technology
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Iga Kenichi
Research Laboratory Of Precision Machinery And Electronics
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Kokubun Yasuo
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology:(present Ad
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Usui Tetsuo
Research Laboratory of Precision Machinery and Electronics, Tokyo Institute of Technology
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Oikawa Masahiro
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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Usui Tetsuo
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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