Iron Gettering Controlled by Size and Density of Oxygen Precipitates in Czochralski-Grown Silicon

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概要

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• The gettering efficiency of iron (Fe) was investigated as a function of the size and density of oxygen precipitates in Czochralski-grown silicon (CZ-Si). During the precipitation treatments, in order to control the size and density of oxygen precipitates, we monitored the oxygen concentration ([O_i]) so that the final [O_i] of the samples were equal to each other. By comparing Fe concentration ([Fe]) determined by electron spin resonance (ESR) in the samples, we discovered that the sample containing precipitates of large size and low density has a stronger gettering efficiency during cooling from a temperature of 1050℃. In contrast, the sample containing precipitates of small size and high density has a stronger gettering efficiency during isothermal annealing at 190℃.

• 1998-04-15

著者

• SUEZAWA Masashi

  Institute for Materials Research,Tohoku University

• Suezawa Masashi

  Institute For Materials Research Tohoku University

• Yamada-kaneta Hiroshi

  Process Development Division Fujitsu Ltd.

• TAKAHASHI Hideki

  Process Development Division, Fujitsu, Ltd.

• Takahashi Hideki

  Process Development Division Fujitsu Ltd.

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