Damage Reduction of Plasma-Treated Carbon Surfaces by Controlled Plasma
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概要
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A glassy carbon (GC) plate was treated with RF glow discharged argon (Ar) plasma in a vacuum chamber with two parallel-plate electrodes. The sheath voltage was controlled independently of other plasma parameters by means of a shunting circuit which was connected parallel to the electrodes. After 30 s of treatment without the shunting circuit, the contact angle of water on the GC surface decreased from 90°to 0°, and the half band width of the Raman band at 1360 cm^<-1> on the GC surface increased from 65 cm^<-1> to 85 cm^<-1> due to a disordered structure in carbon, When sheath voltage was kept constant at 80 V by means of the shunting circuit, the contact angle and the half band width changed to 0°and 72 cm^<-1> respectively, with a high ion density of 6×10^<10>cm^<-3>. GC surfaces were modified sufficiently in a short time and protected from damage using a high-density of ions having moderate collision energy in controlled plasma.
- 社団法人応用物理学会の論文
- 1997-04-15
著者
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Kojima A
Gunma National Coll. Technol. Maebashi Jpn
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Kojima A
Quantum 14 Co. Ltd.
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Kojima Atsushi
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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KOJIMA Akira
Department of Chest Medicine
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OHTE Takeo
Department of Electrical Engineering, Gunma College of Technology
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IZUMI Yori
Department of Information and Computer Engineering, Gunma College of Technology
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Ohte T
Department Of Electrical Engineering Gunma College Of Technology
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Izumi Yori
Department Of Information And Computer Engineering Gunma College Of Technology
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Kojima Akira
Department Of Chemical And Materials Science Gunma National College Of Technology
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