Temperature Distributions Produced in Multilayer Structures by a Scanning CW Laser Beam
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概要
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Laplace-transformed Green's function solutions to linear heat equations are derived for multilayered structures. An analytic expression for linear temperature distribution produced by a scanning CW elliptical Gaussian laser beam is given in a double integral form and its numerical results are presented. In conjunction with the linear temperature formula, a nonlinear algorithm has been developed in order to incorporate temperature-dependent thermal diffusivity, conductivity, and surface reflectivity. The temperature distributions for the Si/SiO_2/Si structure are calculated, including effects of melting of Si. From comparison between the calculation and a measurement on the melting width, it is found that the excess energy absorbed above the melting temperature is spatially redistributed on melting.
- 社団法人応用物理学会の論文
- 1991-07-15
著者
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Yamada Masayoshi
Department Of Electronics And Information Science Faculty Of Engineering And Design Kyoto Institute
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Yamada Masayoshi
Department Of Electronics And Information Science Faculty Of Engineering And Design Kyoto Institute
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