Crystallization and Conductivity of ReO_3 Thin Films Prepared by 90° Off-Axis RF Magnetron Sputtering Method(<Special Section>Recent Progress in Oxide Thin Films by Sputtering)
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概要
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We investigated growth conditions of the ReO_3 thin films, as a first step of establishment of artificial superconducting multi-layer with the infinite layer cuprate and ReO_3. The layers of ReOa were expected to work as a charge reservoir block. The films were deposited from a Re metal target by off-axis reactive sputtering. Conductive and preferentially (100) oriented ReO_3 thin films were obtained by in-situ post-annealing. The lowest resistivity was 4.4 × 10^<-5> ohm・cm at room temperature.
- 社団法人電子情報通信学会の論文
- 2004-02-01
著者
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Yamamoto Hiroshi
Department Of Energy Engineering And Science Nagoya University
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Iwata Nobuyuki
Department Of Electronics & Computer Science College Of Science & Technology Nihon Universit
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FUKAI Kumiko
Department of Electronics & Computer Science, College of Science & Technology, Nihon University
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Fukai Kumiko
Department Of Electronics & Computer Science College Of Science & Technology Nihon Universit
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Yamamoto Hiroshi
Departmemt Of Chemical Engineering University Of Tokyo
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Yamamoto Hiroshi
Department Of Electronics & Computer Science College Of Science & Technology Nihon Universit
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