スパッタ法による垂直面内複合型媒体の作製

概要

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Perpendicular/longitudinal composite media were fabricated by sputtering. It is hard to deposit a perpendicular upper layer on a longitudinal underlayer because of the epitaxy between the layers. Therefore, it is important to prevent the epitaxial growth between the perpendicular upper layer and the longitudinal underlayer. For this Purpose, we attempted to apply an amorphous carbon interlayer. First, the magnetic properties of perpendicular single media with Ti-Cr and C underlayers were compared. As a result, it was found that a perpendicular single medium with a C underlayer had the same propety as a medium with a Ti-Cr underlayer.In accordance with these results,a perpendicular layer was deposited onto a longitudinal layer with a C interlayer. Consequently, the thickness of the C interlayer was optimized. As a result, a perpendicular/longitudinal composite medium was successfully fabricated using 5-nm C interlayer.
社団法人日本磁気学会の論文
1999-04-15