Improvement of the MR Cantilever for Scanning Magnetoresistance Microscope
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概要
- 論文の詳細を見る
We have developed the micro-fabricated cantilever with an MR sensor (MR cantilever) for scanning magnetoresistance microscope (SMRM). In order to improve the stability of the MR signal acquisition and the reproducibility of the system, we have proposed a new fabrication procedure for the SMRM cantilever. The MR cantilever with a high field sensitivity is realized and allows us to measure magnetic field quantitatively only for the relatively large external field. However, for the small field detection, superposition of topographic signals on the magnetic signals is not negligible. To avoid this problem, four-terminal SMRM cantilevers were fabricated. In addition, we accomplish to make the cantilever with a high spatial resolution by miniaturizing the MR element.
- 社団法人日本磁気学会の論文
- 2002-02-01
著者
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MUKASA Koichi
Graduate School of Engineering, Hokkaido University, CREST, Japan Science and Technology Corpporatio
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Mukasa Koichi
Graduate School Of Engineering Hokkaido University
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Sueoka Kazuhisa
Nanoelectronics Laboratory Graduate School Of Engineering Hokkaido University
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SUEOKA Kazuhisa
Graduate school of Engineering, Hokkaido University, PRESTO, Japan Science and Technology Corporatio
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Nakamura Motonori
Graduate School of Engineering, Hokkaido University
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Sueoka Kazuhisa
Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-ku, Sapporo 060-8628, Japan
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