HDI-13 ACTIVE HEAD SLIDERS USING PIEZOELECTRIC THIN FILMS FOR FLYING-HEIGHT CONTROL
スポンサーリンク
概要
- 論文の詳細を見る
This paper describes design and fabrication of a MEMS-based active head slider using a PZT thin film for flying height control in magnetic recording. An air bearing surface (ABS) geometry which generates very low aerodynamic lift force at the head has been designed. The slider has been fabricated monolithically by silicon micromachining process. Change in the flying height of the head above a spinning disk has been successfully confirmed by applying voltage to the PZT actuator.
- 一般社団法人日本機械学会の論文
著者
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Suzuki Kenji
Department Of Applied Physics Osaka University
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Kurita Masayuki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Sasaki Kenji
Department Of Bioindustrial Informatics And Genomics Graduate School Of Agricultural Science Tohoku
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AKIMATSU Takayuki
Department of Engineering Synthesis, Faculty of Engineering, The University of Tokyo
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Akimatsu Takayuki
Department Of Engineering Synthesis Faculty Of Engineering The University Of Tokyo
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Sasaki Kenji
Department Of Engineering Synthesis Faculty Of Engineering The University Of Tokyo
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Suzuki Kenji
Department Of Anesthesia Kitakami Saiseikai Hospital
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