A22-022 A MEMS-BASED ACTIVE-HEAD SLIDER FOR FLYING HEIGHT CONTROL IN MAGNETIC RECORDING
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概要
- 論文の詳細を見る
This paper describes design and fabrication of a MEMS-based active-head slider using a PZT thin film for flying height control in hard disk drives. A piezoelectric cantilever integrated in an air bearing slider is used to adjust the flying height individually. A novel air bearing surface (ABS) geometry that minimizes the aerodynamic lift force generated beneath the head has been designed based on the molecular gas film lubrication (MGL) theory. The sliders with PZT actuators were fabricated monolithically by silicon micromachining process. Performance of the actuator was tested by using an optical surface profiler. The fabricated slider was then mounted on a suspension and flying height of the slider above a spinning disk has been measured by multiple wavelength interferometry. Change in the head-disk spacing has been successfully confirmed by applying voltage to the PZT actuator.
- 一般社団法人日本機械学会の論文
- 2003-11-30
著者
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Suzuki Kenji
Department Of Cardiology Kyoto Second Red Cross Hospital
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Suzuki Kenji
Department Of Engineering Synthesis School Of Engineering The University Of Tokyo
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Suzuki Kenji
Department Of Applied Physics Osaka University
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Kurita Masayuki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Suzuki Kenji
Department Of Anesthesia Kitakami Saiseikai Hospital
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