高速・高精度位置決め機構の整定過程の解析と制御 : 第2報,制振加速度制御法の適用

概要

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We describe the application of vibrationless acceleration control to the settling process of a vibratory positioning mechanism with a semi-closed-loop control system. A high-precision, high-speed positioning system is made and its dynamic model of two degrees of freedom and a higher-order model are constructed for vibration control and computer simulation. Vibrationless feedforward control imput and the corresponding reference velocity are derived for the two-degree-of-freedom model. The condition for efficient application of vibrationless acceleration control to the settling process is presented. Vibrationless acceleration control is performed from -0.27 track width to -0.05 track width between the constant decelerating process and fine positioning process. It is found that overshoot in the positioning process is considerably suppressed by this vibrationless control for such a large deceleration curve where some overshoot with about 2 ms duration is induced by the conventional settling control which ignores natural modes of vibration. Computer simulation results agree well with experimental ones.
社団法人日本機械学会の論文
1994-08-25