レーザ干渉計を応用した非接触微細形状測定装置

概要

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Non-contact measuring instrument with laser interferometer is described in this paper, which can measure the coordinates of micro-shapes on a machined surface. When laser beam in the instrument is focused by an objective lens of 40× and N.A. 0.65,the measurable height of micro-shapes is less than 3.5 μm as a main performance and the measurable inclination is less than ^+_-5.2℃. The linearity is kept between lateral (X-axis) and vertical (Z-axis) displacements. By using the instrument, the following shapes can be measured : cross section of roughness comparison specimen, micro-step height on a silicon wafer and cross section of scratched grooves on aluminum. Their results are compared with the results measured by stylus instrument, interference microscope and scanning electron microscope. The measurement accuracy of the present instrument can be estimated better than 5 nm in the scattered range of measured values.
1984-10-05