3次元自由曲面形状の光非接触測定装置

概要

論文の詳細を見る
To measure 3-dimensional shape of an object, a new optical & noncontact measuring instrument is proposed in this paper. The astigmatic focus error method is applied to the new instrument in order to detect a focused positioning signal of an object surface to be measured. The signal, that is, the scattered light of laser reflected on the surface, is detected by using the optical components of a linear polarized laser, a polarizing beam splitter and so on. The new instrument mainly consists of an optical sensor newly designed, Z-axis table moved by the signal and X/Y tables to move the object. Using the new instrument, the ball surface of 4 mm diameter, coated with white paint and compared with ideal shape, can be measured over ±83°in inclination angle and with 2.1 μm in standard deviation from theoretical value.
公益社団法人精密工学会の論文
1993-07-05