1μm以下における触針式表面粗さ測定機の縦倍率の校正

概要

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There are many cases to measure and evaluate small surface roughness less than 1μm. In this study it is described that small step heights are strictly measured and evaluated by alight-wave interferometer. From the photographs of interference fringes the small step heights are evaluat-ed by the techniques of the method of least squares and the analysis of variance. The evaluated step heights are 0.08μm, 0.23μm, 0.51μm and 1.05μm. These are available as reference specimens to calibrate the vertical magnifications of four kinds of surface roughness measuring instruments with stylus. According to the calibrated result, it is confirmd that the exact calibration of the vertical magnifications is necessary for the measurement of small surface roughness less than 1μm.
公益社団法人精密工学会の論文
1985-10-05