水晶振動子センサー計測によるアンモニアプラズマ中のガス分析

概要

論文の詳細を見る
Quartz sensor measurements were performed on ammonia plasmas to analyze their gas phases. From the analysis using a quadrupole mass spectrometer, it was found that the main products formed in the ammonia plasmas in this study were nitrogen and hydrogen molecules in the ratio of 1:3. The quartz sensor can be used to measure the partial pressure of each gas in binary gas mixtures in ammonia plasmas if they consist of the binary gases of ammonia and a mixture of nitrogen and hydrogen in the ratio of 1:3. However, the results for the ammonia plasmas obtained by the Q-sensor measurement do not agree with those obtained from mass spectroscopy. This indicates that the results of quartz sensor measurements may include information on highly reactive chemical species in addition to that on nitrogen and hydrogen molecules.
日本真空協会の論文
2009-03-20