nMOSFET Reliability Improvement attributed to the Interfacial Dipole formed by La Incorporation in HfO_2
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Lee B.
Ibm Assignees
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SONG S.
SEMATECH
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KANG C.
SEMATECH
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BERSUKER G.
SEMATECH
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CHOI R.
SEMATECH
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KIRSCH P.
IBM Assignees
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JAMMY R.
IBM Assignees
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YOUNG C.
SEMATECH
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HEH D.
SEMATECH
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SIVASUBRAMANI P.
SEMATECH
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LICHTENWALNER J.
Dept. of Materials Science and Engineering, North Carolina State University
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JUR J.
Dept. of Materials Science and Engineering, North Carolina State University
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KINGON A.
Dept. of Materials Science and Engineering, North Carolina State University
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Jur J.
Dept. Of Materials Science And Engineering North Carolina State University
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Kingon A.
Dept. Of Materials Science And Engineering North Carolina State University
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Lichtenwalner J.
Dept. Of Materials Science And Engineering North Carolina State University
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- Effect Of Starting Interface in Scalability/Device Performance of Ultra-Scaled ALD HfSiON/TiN Gate Stacks
- Plasma Nitridation of HfO_2 Enabling a 0.9nm EOT with High Mobility for a Gate First MOSFET
- Highly Manufacturable Hf-silicate Technology with Optimized Composition for Gate-First Metal Gate CMOSFEI
- A novel inversion pulse measurement technique to investigate transient charging characteristics in high-k NMOS transistors
- Physical Origin of Fast Transient Charging in Hafnium Based Gate Dielectrics
- nMOSFET Reliability Improvement attributed to the Interfacial Dipole formed by La Incorporation in HfO_2
- Thermal stability of metal electrodes and its impact on gate dielectric characteristics
- Reliability of thick oxides integrated with HfSiO_x gate dielectric
- Effects of Optimization of Gate Edge Profile on sub-45nm Metal Gate High-k Dielectric Metal-Oxide-Semiconductor Field Effect Transistors Characteristics