Thermal stability of metal electrodes and its impact on gate dielectric characteristics
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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Lee B.
Ibm Assignees
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SONG S.
SEMATECH
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PARK H.
Samsung Assignee
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KANG C.
SEMATECH
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CHOI R.
SEMATECH
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HWANG H.
GIST
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Park H.
Department Of Physics Korea Advanced Institute Of Science And Technology
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LEE B.
SEMATECH
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WEN H.
SEMATECH
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CHANG M.
Department of Materials Science and Engineering, Gwangju Institute of Science and Technology
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JO M.
Department of Materials Science and Engineering, Gwangju Institute of Science and Technology
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LEE T.
Microelectronics Research Center, The University of Texas at Austin
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BROWN G.
SEMATECH
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LEE J.
Microelectronics Research Center, The University of Texas at Austin
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HWANG H.
Department of Materials Science and Engineering, Gwangju Institute of Science and Technology
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LEE T.
University of Texas at Austin
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Park H.
Department Of Geosystem Engineering School Of Engineering The University Of Tokyo
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Lee J.
Microelectronics Research Center The University Of Texas At Austin
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Lee J.
Microcide Pharmaceuticals Inc.
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Park H.
Department of Chemical Engineering, Sogang University
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