HEH D. | SEMATECH
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概要
関連著者
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Lee B.
Ibm Assignees
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SONG S.
SEMATECH
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KANG C.
SEMATECH
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BERSUKER G.
SEMATECH
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CHOI R.
SEMATECH
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YOUNG C.
SEMATECH
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HEH D.
SEMATECH
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KIRSCH P.
IBM Assignees
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JAMMY R.
IBM Assignees
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SIVASUBRAMANI P.
SEMATECH
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LICHTENWALNER J.
Dept. of Materials Science and Engineering, North Carolina State University
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JUR J.
Dept. of Materials Science and Engineering, North Carolina State University
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KINGON A.
Dept. of Materials Science and Engineering, North Carolina State University
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BAE S.
Microelectronics Research Center, Department of Electrical and Computer Engineering
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HUSSAIN M.
SEMATECH
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LEE B.
The University of Texas
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Jur J.
Dept. Of Materials Science And Engineering North Carolina State University
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Kingon A.
Dept. Of Materials Science And Engineering North Carolina State University
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Lichtenwalner J.
Dept. Of Materials Science And Engineering North Carolina State University
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Bae S.
Microelectronics Research Center Department Of Electrical And Computer Engineering
著作論文
- nMOSFET Reliability Improvement attributed to the Interfacial Dipole formed by La Incorporation in HfO_2
- Effects of Optimization of Gate Edge Profile on sub-45nm Metal Gate High-k Dielectric Metal-Oxide-Semiconductor Field Effect Transistors Characteristics