Densified SiOF Film Formation for Preventing Water Absorption
スポンサーリンク
概要
- 論文の詳細を見る
- 1995-08-21
著者
-
Kudo Hiroshi
Department Of Chemistry Graduate School Of Science Tohoku University
-
AWAJI Naoki
Fujitsu Laboratories Ltd.
-
KUDO Hiroshi
Thin Film Technology Dept., Process Dev.Div., Fujitsu Ltd.
-
SHINOHARA Rika
Thin Film Technology Dept., Process Dev.Div., Fujitsu Ltd.
-
TAKEISHI Shunsaku
Thin Film Technology Dept., Process Dev.Div., Fujitsu Ltd.
-
AWAJI Naoki
Electron Devices and Materials Lab., Fujitsu Lab.Ltd.
-
YAMADA Masao
Thin Film Technology Dept., Process Dev.Div., Fujitsu Ltd.
-
Shinohara Ryoichi
Department Of Electronic Engineering University Of Electro-communications
-
Shinohara Rika
Thin Film Technology Dept. Process Dev. Div. Fujitsu Ltd
-
Awaji Naoki
Electron Devices And Materials Lab. Fujitsu Lab. Ltd
-
Takeishi Shunsaku
Thin Film Technology Dept. Process Dev. Div. Fujitsu Ltd
-
Kudo Hiroshi
Thin Film Technology Dept. Process Dev. Div. Fujitsu Ltd
-
Kudo Hiroshi
Thin Film Technology Department Process Development Division Fujitsu Limited
-
Yamada Masao
Thin Film Technology Dept. Process Dev. Div. Fujitsu Ltd
関連論文
- Long-Term Survival After Surgical Resection of Primary Spinal Malignant Melanoma : Case Report
- Large Blood Pressure Variability and Hypertensive Cardiac Remodeling : Role of Cardiac Inflammation
- PJ-319 Prolonged Enhancement of Perivascular Inflammation and Oxidative Stress Aggravates Hypertensive Myocardial Fibrosis and Diastolic Dysfunction in Ovariectomized Rats(Cardiac hypertrophy, basic/clinical-4, The 71st Annual Scientific Meeting of the Ja
- Polypropylene Mesh Substitute for the Fascial Defect After Using for the Dural Repair : Technical Note
- Chronologic Changes of Fasudil Hydrochloride and Hydroxyfasudil in Cerebrospinal Fluid of Patients With Aneurysmal Subarachnoid Hemorrhage
- X-Ray Reflectometry and Infrared Analysis of Native Oxides on Si (100) Formed by Chemical Treatment
- Transient Oxide Layer at a Thermally Grown SiO_2/Si Interface, Interpreted Based on Local Vibration and X-Ray Reflectivity
- X-Ray Reflectometry and Infrared Analysis of Native Oxides on Si(100) Formed in Chemical Treatment
- Delayed Cerebrospinal Fluid Rhinorrhea Seven Months After Transsphenoidal Surgery for Pituitary Adenoma : Case Report
- Lifetime and Spin Relaxation Time Measurements of Micro-Fabricated GaAs Tips
- Fabrication of GaAs Microtips and Their Application to Spin-Polarized Scanning Tunneling Microscope
- Wavelength-Dispersive Total Reflection X-Ray Fluorescence with High-Brilliance Undulator Radiation at SPring-8
- Detection Limits of Trace Elements for Wavelength Dispersive Total X-Ray Fluorescence under High Flux Synchrotron Radiation
- Pressure Overload-Induced Transient Oxidative Stress Mediates Perivascular Inflammation and Cardiac Fibrosis through Angiotensin II
- Dechannelling of Fast Ions in Distorted Crystals. : II. Spherical Precipitates in Al-Zn Alloy
- Novel Interface Structures between Ultrathin Oxynitride and Si(001) Studied by X-Ray Diffraction
- Densified SiOF Film Formation for Preventing Water Absorption
- High-Density Layer at the SiO_2/Si Interface Observed by Difference X-Ray Reflectivity
- Densified SiOF Film Formation for Preventing Water Absorption
- High-Accuracy X-ray Reflectivity Study of Native Oxide Formed in Chemical Treatment
- Improvement of Dose Uniformity in Large Exposure Field for Synchrotron Radiation Lithography
- Development of Highly Stable Synchrotron Radiation Source at SORTEC : X-Ray Lithography
- Development of Highly Stable Synchrotron Radiation Source at SORTEC
- Chronic Subdural Hematoma in Elderly People: Present Status on Awaji Isl and Epidemiological Prospect
- CHARACTERIZATION OF THE cDNA CLONE TO RICE BLACK-STREAKED DWARF VIRUS GENOME SEGMENT 10
- Multicentric Glioblastoma Multiforme Occurring in the Supra- and the Infratentorial Regions : Case Report
- Mass Spectrometric Investigation of the Vapor over the LnCl_3-KCl Equimolar Melt (Ln=Nd, Er) at High Temperatures
- Technetium(IV) Oxide Colloids and the Precursor Produced by Bremsstrahlung Irradiation of Aqueous Pertechnetate Solution
- Intraosseous Meningioma with a Dural Defect : Case Report
- Positron Annihilation in Liquid Scintillator for Electron Antineutrino Detection
- Synthesis, Structure, and Spectroscopic Properties of fac-[Tc^ICl(CO)_3(bpy)] (bpy = 2,2'-bipyridine)
- Phenoxo-Bridged Dimeric Structure of Technetium(I) Tricarbonyl Complex with Schiff Base Ligand
- A Novel Seven-coordinate Technetium(IV) Complex : Synthesis and Characterization of [TcO(tpen)]^ (tpen = N,N,N',N'-Tetrakis(2-pyridylmethyl)ethylenediamine)
- X-ray Crystallographic Determination of the Structure of trans-Dichloro[N, N'-ethylenebis-(3, 5-dimethylsalicylideneiminato)]technetium(IV)
- Synthesis and Structure of Nitridotechnetium(V) Complex of Tetradentate Amine Oxime [TcN(pnao)(H_2O)]^+
- Demographic genetics of the American beech (Fagus grandifolia Ehrh.) III. Genetic substructuring of coastal plain population in Maryland
- Application of SiOF Film Deposited Using TEOS/TEFS/O_2 System to Multi-Level Interconnection Designed with 0.25μm Rule
- Dechannelling of Fast Ions at Dislocation
- A Diffusion Model of Planar Channelling of Fast Charged Particles : Backscattered Energy Spectra and Diffusion Constant
- Determination of Defect Distribution in Single Crystals by Channelling of Fast Charged Particles
- Visualization of a Limit Cycle Orbit in a Taylor Vortex Flow with a Short Annulus
- Dechannelling of Fast Ions in Distorted Crystals. : I. Dislocations
- Densified SiOF Film Formation for Preventing Water Absorption
- Detection Limits of Trace Elements for Wavelength Dispersive Total X-Ray Fluorescence under High Flux Synchrotron Radiation
- Novel Interface Structures between Ultrathin Oxynitride and Si(001) Studied by X-Ray Diffraction
- Nondestructive Measurement of Hexavalent Chromium in Chromate Conversion Coatings Using X-ray Absorption Near Edge Structure