Determination of Defect Distribution in Single Crystals by Channelling of Fast Charged Particles
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概要
- 論文の詳細を見る
Channeling of fast protons in silicon and germanium crystals with surface damaged layer was studied by backscattering method. The energy spectra of the backscattered protons can be interpreted by a theory based on the particle diffusion in the transverse momentum space. It is also demonstrated that the theory is applicable to the determination of the depth distribution profiles of the lattice defects in imperfect crystals.
- 社団法人日本物理学会の論文
- 1974-01-15
著者
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Kudo Hiroshi
Department Of Chemistry Graduate School Of Science Tohoku University
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Mannami Michi-hiko
Department Of Engineering Science Kyoto University
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Kudo Hiroshi
Department Of Physics Faculty Of Science Kyoto University
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Oshiyama Takashi
Department Of Physics Faculty Of Science Kyoto University
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Kudo Hiroshi
Department Of Biology Faculty Of Science Kobe University
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Mannami Michi-hiko
Deparment of Engineering Science,Kyoto University
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